COOLING SHEET ATTACHMENT APPARATUS TO FOCUSING RING FOR SEMICONDUCTOR MANUFACTURING APPARATUS

Provided is a cooling sheet attachment apparatus to a focusing ring for a semiconductor manufacturing apparatus, including: a vacuum chamber equipped with a sheet support ring fixed to seat a cooling sheet in a chamber body with an adhesion surface exposed in an upward direction, a centering jig ins...

Full description

Saved in:
Bibliographic Details
Main Author Hwang, Man Soo
Format Patent
LanguageEnglish
Published 09.06.2022
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
Online AccessGet full text

Cover

More Information
Summary:Provided is a cooling sheet attachment apparatus to a focusing ring for a semiconductor manufacturing apparatus, including: a vacuum chamber equipped with a sheet support ring fixed to seat a cooling sheet in a chamber body with an adhesion surface exposed in an upward direction, a centering jig installed on an inner or outer circumferential surface of the sheet support ring liftably to be moved back in the upward direction by an elastic support, a cover for opening/closing installed above the chamber body and lifted by a lift unit, a press unit provided on the cover to press down the focusing ring, and a vacuum suction tube connected to the chamber body for vacuum suction; and a vacuum suction unit to create a vacuum in the vacuum chamber by the suction through the vacuum suction tube.
Bibliography:Application Number: US202117500494