Vacuum device having a sintered metal bag filter

• Main Author: DIENER, Christof-Herbert
• Format: Patent
• Language: English
• Published: 19.05.2022
• Subjects: ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; PERFORMING OPERATIONS; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL; PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS; SEPARATION; TRANSPORTING

The invention relates to a vacuum device having a vacuum chamber and to a vacuum pump for evacuating the vacuum chamber. The vacuum device can have a plasma generator in order to be able to treat items to be treated in the vacuum chamber with a plasma. An exhaust gas particle filter is connected upstream of the vacuum pump in order to protect the vacuum pump from aggressive reagents from the vacuum chamber. The exhaust gas particle filter has a filter element having a plurality of sintered metal filter bags. The sintered metal filter bags are preferably each formed from two tapered sintered sheet metal strips. The filter element can be connected to the plasma generator as an electrode of the plasma generator. The invention further relates to the use of an exhaust gas particle filter having sintered metal filter bags for protecting a vacuum pump.