Method and Systems Useful for Producing Aluminum Ions

Described are ion implantation devices, systems, and methods, and in particular to an ion source that is useful for generating an aluminum ion beam.

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Bibliographic Details
Main Authors SWEENEY, Joseph D, CHAMBERS, Barry Lewis, TANG, Ying, BYL, Oleg, DESPRES, Joe R
Format Patent
LanguageEnglish
Published 07.04.2022
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Summary:Described are ion implantation devices, systems, and methods, and in particular to an ion source that is useful for generating an aluminum ion beam.
Bibliography:Application Number: US202117492089