DEBRIS CLEANING DEVICE AND ELECTROPLATING SYSTEM

A debris cleaning device includes: a process treatment tank for containing a liquid medicine and a substrate to be treated, wherein the bottom of the tank body of the process treatment tank is provided with a liquid medicine discharge port, and the side wall of the tank body of the process treatment...

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Bibliographic Details
Main Authors WANG, Chengfei, YUAN, Guangcai, QI, Qi, SUN, Shaodong, ZHANG, Guocai, DONG, Pengcheng, YAN, Junwei, DONG, Shihao
Format Patent
LanguageEnglish
Published 31.03.2022
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Summary:A debris cleaning device includes: a process treatment tank for containing a liquid medicine and a substrate to be treated, wherein the bottom of the tank body of the process treatment tank is provided with a liquid medicine discharge port, and the side wall of the tank body of the process treatment tank is provided with a liquid medicine inlet port; and a self-circulation debris removal system, the self-circulation debris removal system comprising a circulation pipeline communicating between the liquid medicine discharge port and the liquid medicine inlet port, the circulation pipeline being provided with a control valve for controlling the on-off state of the circulation pipeline, a debris filtering and collecting device for filtering the debris in the circulation pipeline, and a power pump for providing circulation driving force for the liquid medicine in the circulation pipeline.
Bibliography:Application Number: US202117398980