DETERMINING MOVING PROPERTIES OF A TARGET IN AN EXTREME ULTRAVIOLET LIGHT SOURCE

An apparatus includes: a diagnostic system configured to diagnostically interact with a current target (110c) traveling along a trajectory (TR) and before the current target enters a target space; a first detection apparatus (120) configured to detect first light; a second detection apparatus (130)...

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Bibliographic Details
Main Author Rafac, Robert Jay
Format Patent
LanguageEnglish
Published 17.03.2022
Subjects
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
X-RAY TECHNIQUE
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Summary:An apparatus includes: a diagnostic system configured to diagnostically interact with a current target (110c) traveling along a trajectory (TR) and before the current target enters a target space; a first detection apparatus (120) configured to detect first light; a second detection apparatus (130) configured to detect second light; and a control system (150) in communication with the first and second detection apparatuses. The first light includes: light (140) produced from an interaction between the no current target and the diagnostic system, and light (142) emitted from a plasma produced by a previous target. The second light includes the light (142) emitted from the plasma produced by the previous target. The control system (150) is configured to: produce an analysis signal based on first and second signals produced from respective outputs of the first and second detection apparatuses; and estimate a property of the current target based on the produced analysis signal.
Bibliography:Application Number: US202017416636