METHOD FOR DECISION MAKING IN A SEMICONDUCTOR MANUFACTURING PROCESS

• Main Authors: PISARENCO, Maxim, TSIROGIANNIS, Georgios, BECKERS, Johan Franciscus Maria, KUNNEN, Johan Gertrudis Cornelis, BORGER, Hendrik Cornelis Anton, HLOD, Andriy, DAWARE, Ajinkya Ravindra, HUBAUX, Arnaud, PONGERS, Willem Richard, GONZALEZ HUESCA, Juan Manuel, LI, Chung-Hsun, DEJONG, Frederik Eduard, DAVIES, Dylan John David
• Format: Patent
• Language: English
• Published: 17.03.2022
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CALCULATING; CINEMATOGRAPHY; COMPUTING; COUNTING; ELECTRIC DIGITAL DATA PROCESSING; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS

A method for categorizing a substrate subject to a semiconductor manufacturing process including multiple operations, the method including: obtaining values of functional indicators derived from data generated during one or more of the multiple operations on the substrate, the functional indicators characterizing at least one operation; applying a decision model including one or more threshold values to the values of the functional indicators to obtain one or more categorical indicators; and assigning a category to the substrate based on the one or more categorical indicators.