SEMICONDUCTOR MASK RESHAPING USING A SACRIFICIAL LAYER
Provided herein are methods and related apparatus for mask reconstruction in an etch process. The methods involve depositing a sacrificial layer on the mask layer. The sacrificial layer may be used to protect position on the mask layer. Following mask reshaping, the sacrificial layer may be removed...
Saved in:
Main Authors | , , , |
---|---|
Format | Patent |
Language | English |
Published |
10.03.2022
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | Provided herein are methods and related apparatus for mask reconstruction in an etch process. The methods involve depositing a sacrificial layer on the mask layer. The sacrificial layer may be used to protect position on the mask layer. Following mask reshaping, the sacrificial layer may be removed using the same etch process that is used to etch the target material. |
---|---|
Bibliography: | Application Number: US202017310772 |