RARE-EARTH MATERIALS FOR INTEGRATED CIRCUIT STRUCTURES
Disclosed herein are rare-earth materials, structures, and methods for integrated circuit (IC) structures. For example, in some embodiments, a precursor for atomic layer deposition (ALD) of a rare-earth material in an IC structure may include a rare-earth element and a pincer ligand bonded to the ra...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
24.02.2022
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Subjects | |
Online Access | Get full text |
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Summary: | Disclosed herein are rare-earth materials, structures, and methods for integrated circuit (IC) structures. For example, in some embodiments, a precursor for atomic layer deposition (ALD) of a rare-earth material in an IC structure may include a rare-earth element and a pincer ligand bonded to the rare-earth element. |
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Bibliography: | Application Number: US202016999471 |