BROADBAND LASER-PUMPED PLASMA LIGHT SOURCE

A light source with radiating plasma sustained in the gas-filled chamber by a focused beam of CW laser. The gas is inert gas with a purity of at least 99.99%. The chamber contains a metal housing with at least one window made of MgF2 for outputting a plasma radiation. Each window is located in a hol...

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Main Authors GAYASOV, Robert Rafilevich, LASH, Aleksandr Andreevich, ABRAMENKO, Dmitriy Borisovich, GLUSHKOV, Denis Alexandrovich, KRIVTSUN, Vladimir Mikhailovich
Format Patent
LanguageEnglish
Published 17.02.2022
Subjects
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
X-RAY TECHNIQUE
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Summary:A light source with radiating plasma sustained in the gas-filled chamber by a focused beam of CW laser. The gas is inert gas with a purity of at least 99.99%. The chamber contains a metal housing with at least one window made of MgF2 for outputting a plasma radiation. Each window is located in a hole of the housing on the end of a sleeve and is soldered to the sleeve by means of glass cement, and each sleeve is welded to the hole of the metal housing on the outside seam. The sleeves and the housing are made of an alloy with a coefficient of linear thermal expansion (CLTE), matched with the CLTE of the MgF2 crystal in the direction perpendicular to the optical axis of the MgF2 crystal. The technical result consists in expanding the radiation spectrum of the light source into the VUV region.
Bibliography:Application Number: US202117514178