LEARNING DEVICE, INFERENCE DEVICE, AND LEARNED MODEL

A learning device for performing a machine learning based on a learning model using data input to an input layer, includes: a calculation part configured to calculate a predetermined number of features, in which simulation data as a result of simulating semiconductor manufacturing processes by setti...

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Bibliographic Details
Main Authors YAMAMOTO, Kosuke, MATSUZAKI, Kazuyoshi, FUSHIMI, Naoshige, FUKUDOME, Motoshi, ITABASHI, Ken
Format Patent
LanguageEnglish
Published 17.02.2022
Subjects
CALCULATING
COMPUTER SYSTEMS BASED ON SPECIFIC COMPUTATIONAL MODELS
COMPUTING
COUNTING
ELECTRIC DIGITAL DATA PROCESSING
PHYSICS
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Summary:A learning device for performing a machine learning based on a learning model using data input to an input layer, includes: a calculation part configured to calculate a predetermined number of features, in which simulation data as a result of simulating semiconductor manufacturing processes by setting environmental information inside a process vessel in which the semiconductor manufacturing processes are performed and using a predetermined component provided in the process vessel as a variable, and XY coordinates parallel to a plane of a wafer are associated with each other; and an input part configured to input the calculated predetermined number of features to the input layer.
Bibliography:Application Number: US201917274739