ALIGNMENT DEVICE AND LENS ALIGNMENT SYSTEM

An alignment device includes a base table, a plurality of electric actuators attached to the base table, an alignment table supported by the plurality of electric actuators. Each of the plurality of electric actuators includes a linear motion device that drives the alignment table in a direction app...

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Bibliographic Details
Main Authors Fukushima, Hajime, Shimamura, Marie, Hirota, Jun, Iguchi, Junichi
Format Patent
LanguageEnglish
Published 27.01.2022
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Summary:An alignment device includes a base table, a plurality of electric actuators attached to the base table, an alignment table supported by the plurality of electric actuators. Each of the plurality of electric actuators includes a linear motion device that drives the alignment table in a direction approaching or separating from the base table.
Bibliography:Application Number: US201917298300