ALIGNMENT DEVICE AND LENS ALIGNMENT SYSTEM
An alignment device includes a base table, a plurality of electric actuators attached to the base table, an alignment table supported by the plurality of electric actuators. Each of the plurality of electric actuators includes a linear motion device that drives the alignment table in a direction app...
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Main Authors | , , , |
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Format | Patent |
Language | English |
Published |
27.01.2022
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Subjects | |
Online Access | Get full text |
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Summary: | An alignment device includes a base table, a plurality of electric actuators attached to the base table, an alignment table supported by the plurality of electric actuators. Each of the plurality of electric actuators includes a linear motion device that drives the alignment table in a direction approaching or separating from the base table. |
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Bibliography: | Application Number: US201917298300 |