METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES USING A HEAT TRANSFER FLUID COMPRISING FLUORINATED COMPOUNDS HAVING A LOW GWP
The present invention relates to a method for manufacturing semiconductor devices, including a step wherein a semi-conductor device exchanges heat with a heat transfer fluid. The heat transfer fluid comprises one or more chemical compounds having the general formula: Ph(ORf)x (I) wherein Ph is an ar...
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Main Authors | , , , |
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Format | Patent |
Language | English |
Published |
27.01.2022
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Subjects | |
Online Access | Get full text |
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Summary: | The present invention relates to a method for manufacturing semiconductor devices, including a step wherein a semi-conductor device exchanges heat with a heat transfer fluid. The heat transfer fluid comprises one or more chemical compounds having the general formula: Ph(ORf)x (I) wherein Ph is an aromatic ring linked to one or more ether groups -ORf where each -Rf: - is a monovalent fluorinated alkyl group comprising at least one C-F bond, - has a carbon chain, preferably a C1-C10 carbon chain, which can be linear or can comprise branches and/or cycles, and, optionally, can comprise in chain heteroatoms selected from O, N or S, and wherein, when X>1, the -Rf groups on the same molecule can be equal to or different from each other. |
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Bibliography: | Application Number: US201917312032 |