INTEGRATED CIRCUIT DEVICE INCLUDING VERTICAL MEMORY DEVICE
An integrated circuit device includes: a substrate having a cell region, a peripheral circuit region, and an interconnection region between the cell region and the peripheral circuit region; a first cell stack structure and a second cell stack structure on the first cell stack structure, each includ...
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Main Authors | , , , , , |
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Format | Patent |
Language | English |
Published |
02.12.2021
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Subjects | |
Online Access | Get full text |
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