LASER DEVICE

A laser device includes a light source generating a laser beam, a stage, and a lens assembly disposed between the light source and the stage and irradiating the laser beam to a substrate disposed on the stage. The lens assembly includes a first lens assembly making divergent the laser beam provided...

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Bibliographic Details
Main Authors KIM, JONGKI, HAN, GYOOWAN, BAE, YOONGYEONG, ASLANOV, Emil
Format Patent
LanguageEnglish
Published 25.11.2021
Subjects
CLADDING OR PLATING BY SOLDERING OR WELDING
CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING
MACHINE TOOLS
METAL-WORKING NOT OTHERWISE PROVIDED FOR
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PERFORMING OPERATIONS
PHYSICS
SOLDERING OR UNSOLDERING
TRANSPORTING
WELDING
WORKING BY LASER BEAM
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Summary:A laser device includes a light source generating a laser beam, a stage, and a lens assembly disposed between the light source and the stage and irradiating the laser beam to a substrate disposed on the stage. The lens assembly includes a first lens assembly making divergent the laser beam provided from the light source, a deflector changing a path of the laser beam provided from the first lens assembly, and a second lens assembly condensing the laser beam provided from the deflector and irradiating the condensed laser beam to the substrate.
Bibliography:Application Number: US202117239732