TOOL FOR MODIFYING A SUPPORT SURFACE

A tool for modifying substrate support elements of a substrate holder, the substrate support elements having support surfaces for supporting a substrate, the tool includes a main body having a main body surface, and multiple protrusions from the main body surface, the multiple protrusions having dis...

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Bibliographic Details
Main Authors SCHOLTEN, Bert Dirk, LINDEIJER, Tjarco, BILLEKENS, Peter Andreas Maria, VAN VERSEVELD, Hendrikus Theodorus Jacobus Franciscus, MEHAGNOUL, Harold Anton, VAN DE WINKEL, Jimmy Matheus Wilhelmus, VERMEULEN, Marcus Martinus Petrus Adrianus, GUAN, Tiannan, VAN NUENEN, Cas Johannes Petrus Maria
Format Patent
LanguageEnglish
Published 26.08.2021
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
DRESSING OR CONDITIONING OF ABRADING SURFACES
ELECTROGRAPHY
FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
GRINDING
HOLOGRAPHY
MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING
MATERIALS THEREFOR
ORIGINALS THEREFOR
PERFORMING OPERATIONS
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
POLISHING
TRANSPORTING
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Summary:A tool for modifying substrate support elements of a substrate holder, the substrate support elements having support surfaces for supporting a substrate, the tool includes a main body having a main body surface, and multiple protrusions from the main body surface, the multiple protrusions having distal ends configured to contact the support surfaces to modify the substrate support elements. Furthermore, a lithographic apparatus and a method comprising such a tool are provided.
Bibliography:Application Number: US201917260649