SUBSTRATE WITH WATER-AND-OIL REPELLENT LAYER, VAPOR DEPOSITION MATERIAL, AND METHOD FOR PRODUCING SUBSTRATE WITH WATER-AND-OIL REPELLENT LAYER

• Main Authors: Ishizeki, Kenji, Kodaira, Hirokazu, Anazawa, Asako, Tomiyori, Yusuke, Iwahashi, Maemi, Tokunaga, Yoshihito, Kobayashi, Daisuke
• Format: Patent
• Language: English
• Published: 29.07.2021
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; COMPOUNDS THEREOF; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; INORGANIC CHEMISTRY; METALLURGY; NON-METALLIC ELEMENTS; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

To provide a water/oil repellent layer-provided substrate having a water/oil repellent layer excellent in abrasion resistance, a deposition material and a method for producing a water/oil repellent layer-provided substrate.The water/oil repellent layer-provided substrate of the present invention is a water/oil repellent layer-provided substrate comprising a substrate, an undercoat layer and a water/oil repellent layer in this order,wherein the water/oil repellent layer comprises a condensate of a fluorinated compound having a reactive silyl group,the undercoat layer contains an oxide containing silicon and at least one element selected from the group consisting of titanium, zirconium and aluminum, andthe ratio of the total molar concentration of titanium, zirconium and aluminum in the undercoat layer to the molar concentration of silicon in the undercoat layer is from 0.03 to 0.7.