SUBSTRATE, ALIGNMENT METHOD AND ALIGNMENT DEVICE

The present disclosure provides a substrate, an alignment method and an alignment device. The substrate includes an alignment mark and an auxiliary alignment mark. A shape of the auxiliary alignment mark is different from a shape of the substrate alignment mark.

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Bibliographic Details
Main Authors WANG, Zhantao, TANG, Runmin, WANG, Jun, WANG, Junlong, REN, Xing
Format Patent
LanguageEnglish
Published 22.07.2021
Subjects
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