SUBSTRATE, ALIGNMENT METHOD AND ALIGNMENT DEVICE

• Main Authors: WANG, Zhantao, TANG, Runmin, WANG, Jun, WANG, Junlong, REN, Xing
• Format: Patent
• Language: English
• Published: 22.07.2021
• Subjects: BASIC ELECTRIC ELEMENTS; CALCULATING; COMPUTING; COUNTING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; IMAGE DATA PROCESSING OR GENERATION, IN GENERAL; PHYSICS; SEMICONDUCTOR DEVICES

The present disclosure provides a substrate, an alignment method and an alignment device. The substrate includes an alignment mark and an auxiliary alignment mark. A shape of the auxiliary alignment mark is different from a shape of the substrate alignment mark.