SUBSTRATE, ALIGNMENT METHOD AND ALIGNMENT DEVICE

The present disclosure provides a substrate, an alignment method and an alignment device. The substrate includes an alignment mark and an auxiliary alignment mark. A shape of the auxiliary alignment mark is different from a shape of the substrate alignment mark.

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Bibliographic Details
Main Authors WANG, Zhantao, TANG, Runmin, WANG, Jun, WANG, Junlong, REN, Xing
Format Patent
LanguageEnglish
Published 22.07.2021
Subjects
BASIC ELECTRIC ELEMENTS
CALCULATING
COMPUTING
COUNTING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
PHYSICS
SEMICONDUCTOR DEVICES
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Summary:The present disclosure provides a substrate, an alignment method and an alignment device. The substrate includes an alignment mark and an auxiliary alignment mark. A shape of the auxiliary alignment mark is different from a shape of the substrate alignment mark.
Bibliography:Application Number: US201916767445