SUBSTRATE TRANSFER ROBOT AND METHOD OF DETECTING OPTICAL-AXIS DEVIATION OF SUBSTRATE HOLD HAND

A method of detecting a substrate hold hand optical axis deviation includes: acquiring a hand reference turning position at which an ideal optical axis extends in a horizontal first direction; performing a first search processing; performing a second search processing similar to the first search pro...

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Bibliographic Details
Main Authors OKADA, Hiroyuki, YOSHIDA, Masaya
Format Patent
LanguageEnglish
Published 15.07.2021
Subjects
CHAMBERS PROVIDED WITH MANIPULATION DEVICES
HAND TOOLS
MANIPULATORS
PERFORMING OPERATIONS
PORTABLE POWER-DRIVEN TOOLS
TRANSPORTING
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Summary:A method of detecting a substrate hold hand optical axis deviation includes: acquiring a hand reference turning position at which an ideal optical axis extends in a horizontal first direction; performing a first search processing; performing a second search processing similar to the first search processing to a second target body; and detecting an optical axis inclination from the ideal optical axis based on a difference between the positions detected in the first search processing and the second search processing. A distance in the second direction from the turning axis to the first target body is equal to a distance in the second direction from the turning axis to the second target body. On the hand, an intersecting position between the optical axis and the first target body is different from an intersecting position between the optical axis and the second target body.
Bibliography:Application Number: US201917054876