SINGULATION OF OPTICAL WAVEGUIDE MATERIALS
Methods for singulating an optical waveguide material at a contour include directing a first laser beam onto a first side of the optical waveguide material to generate a first group of perforations in the optical waveguide material. A second laser beam is directed onto a second side of the optical w...
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Main Authors | , , , |
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Format | Patent |
Language | English |
Published |
24.06.2021
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Subjects | |
Online Access | Get full text |
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Summary: | Methods for singulating an optical waveguide material at a contour include directing a first laser beam onto a first side of the optical waveguide material to generate a first group of perforations in the optical waveguide material. A second laser beam is directed onto a second side of the optical waveguide material to generate a second group of perforations in the optical waveguide material. The second side is opposite the first side. The first group of perforations and the second group of perforations define a perforation zone at the contour. A third laser beam is directed at the perforation zone to singulate the optical waveguide material at the perforation zone. |
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Bibliography: | Application Number: US202017126574 |