SINGULATION OF OPTICAL WAVEGUIDE MATERIALS

Methods for singulating an optical waveguide material at a contour include directing a first laser beam onto a first side of the optical waveguide material to generate a first group of perforations in the optical waveguide material. A second laser beam is directed onto a second side of the optical w...

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Bibliographic Details
Main Authors Singh, Vikramjit, Vaughn, Michal Beau Dennison, Martinez, JR., Arturo Manuel, Sawicki, Joseph Christopher
Format Patent
LanguageEnglish
Published 24.06.2021
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Summary:Methods for singulating an optical waveguide material at a contour include directing a first laser beam onto a first side of the optical waveguide material to generate a first group of perforations in the optical waveguide material. A second laser beam is directed onto a second side of the optical waveguide material to generate a second group of perforations in the optical waveguide material. The second side is opposite the first side. The first group of perforations and the second group of perforations define a perforation zone at the contour. A third laser beam is directed at the perforation zone to singulate the optical waveguide material at the perforation zone.
Bibliography:Application Number: US202017126574