ELECTROSTATIC CHUCK AND SUBSTRATE FIXING DEVICE

A positive electrode and a negative electrode face each other with a first gap around a gas hole, face each other with a first path and a second path with the gas hole being interposed therebetween, and face each other with a second gap around the gas hole. The first path and the second path converg...

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Bibliographic Details
Main Author Kusama, Yasuhiko
Format Patent
LanguageEnglish
Published 10.06.2021
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Summary:A positive electrode and a negative electrode face each other with a first gap around a gas hole, face each other with a first path and a second path with the gas hole being interposed therebetween, and face each other with a second gap around the gas hole. The first path and the second path converge to be the first gap at a first end, and converge to be the second gap at a second end. At the first end and the second end, corner portions formed by the positive electrode and the negative electrode are rounded. A first distance between the gas hole and the positive electrode is constant in the first path except the corner portions. A second distance between the gas hole and the negative electrode is constant in the second path except the corner portions. The first distance and the second distance are the same.
Bibliography:Application Number: US202017111923