CHARGED PARTICLE BEAM SOURCE AND A METHOD FOR ASSEMBLING A CHARGED PARTICLE BEAM SOURCE
A charged particle beam source that may include an emitter that has a tip for emitting charged particles; a socket; electrodes; a filament that is connected to the electrodes and to the emitter; electrodes for providing electrical signals to the filament; a support element that is connected to the e...
Saved in:
Main Authors | , , , , , , , , |
---|---|
Format | Patent |
Language | English |
Published |
10.06.2021
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | A charged particle beam source that may include an emitter that has a tip for emitting charged particles; a socket; electrodes; a filament that is connected to the electrodes and to the emitter; electrodes for providing electrical signals to the filament; a support element that is connected to the emitter; and a support structure that comprises one or more interfaces for contacting only a part of the support element while supporting the support element. |
---|---|
Bibliography: | Application Number: US202017110167 |