CHARGED PARTICLE BEAM SOURCE AND A METHOD FOR ASSEMBLING A CHARGED PARTICLE BEAM SOURCE

A charged particle beam source that may include an emitter that has a tip for emitting charged particles; a socket; electrodes; a filament that is connected to the electrodes and to the emitter; electrodes for providing electrical signals to the filament; a support element that is connected to the e...

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Bibliographic Details
Main Authors Eytan, Guy, Shavit, Lavy, Avneri, Israel, Yuli, Ofer, Levin, Jacob, Krivts (Krayvitz), Igor, Uziel, Yoram, Schlimoff, Natan, Asulin, Itay
Format Patent
LanguageEnglish
Published 10.06.2021
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Summary:A charged particle beam source that may include an emitter that has a tip for emitting charged particles; a socket; electrodes; a filament that is connected to the electrodes and to the emitter; electrodes for providing electrical signals to the filament; a support element that is connected to the emitter; and a support structure that comprises one or more interfaces for contacting only a part of the support element while supporting the support element.
Bibliography:Application Number: US202017110167