SEMICONDUCTOR MEMORY DEVICE
A semiconductor memory device according to an embodiment includes: a row decoder and a memory cell array including a first block. The first block includes: a first region, a second region adjacent to the first region in the first direction, and a third region configured to connect the first region a...
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Main Author | |
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Format | Patent |
Language | English |
Published |
03.06.2021
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Subjects | |
Online Access | Get full text |
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Summary: | A semiconductor memory device according to an embodiment includes: a row decoder and a memory cell array including a first block. The first block includes: a first region, a second region adjacent to the first region in the first direction, and a third region configured to connect the first region and the second region- The memory cell array further includes: a first insulating layer buried in a first trench between the first region and the second region and in contact with the third region; a first contact plug provided in the first insulating layer and electrically connected to the row decoder; and a first interconnect configured to connect a selection gate line and the first contact plug. |
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Bibliography: | Application Number: US202117175045 |