SYSTEMS, DEVICES, AND METHODS FOR CONTAMINANT RESISTANT INSULATIVE STRUCTURES

Embodiments of systems, devices, and methods relate to an electrode standoff isolator. An example electrode standoff isolator includes a plurality of adjacent insulative segments positioned between a proximal end and a distal end of the electrode standoff isolator. A geometry of the adjacent insulat...

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Bibliographic Details
Main Authors Killer, Christopher J, Vekselman, Vladislav, Leuenberger, Joshua
Format Patent
LanguageEnglish
Published 20.05.2021
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Summary:Embodiments of systems, devices, and methods relate to an electrode standoff isolator. An example electrode standoff isolator includes a plurality of adjacent insulative segments positioned between a proximal end and a distal end of the electrode standoff isolator. A geometry of the adjacent insulative is configured to guard a surface area of the electrode standoff isolator against deposition of a conductive layer of gaseous phase materials from a filament of an ion source.
Bibliography:Application Number: US202017006049