FLOW RATE CONTROL DEVICE AND FLOW RATE CONTROL METHOD

A flow rate control device 100 includes a control valve 6 provided in a flow path 1, a flow rate measurement unit 2, 3 for measuring fluid flow rate controlled by the control valve 6, and a controller 7. The controller 7 is configured so as to control the opening/closing operation of the control val...

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Main Authors SUGITA, Katsuyuki, YASUMOTO, Naofumi, HIRATA, Kaoru, IDEGUCHI, Keisuke, NISHINO, Kouji, OGAWA, Shinya
Format Patent
LanguageEnglish
Published 13.05.2021
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Summary:A flow rate control device 100 includes a control valve 6 provided in a flow path 1, a flow rate measurement unit 2, 3 for measuring fluid flow rate controlled by the control valve 6, and a controller 7. The controller 7 is configured so as to control the opening/closing operation of the control valve 6 to match the measurement integral flow rate based on the signal outputted from the flow rate measurement unit (Vn+Vd) to the target integral flow rate Vs.
Bibliography:Application Number: US201916970278