FLOW RATE CONTROL DEVICE AND FLOW RATE CONTROL METHOD
A flow rate control device 100 includes a control valve 6 provided in a flow path 1, a flow rate measurement unit 2, 3 for measuring fluid flow rate controlled by the control valve 6, and a controller 7. The controller 7 is configured so as to control the opening/closing operation of the control val...
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Main Authors | , , , , , |
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Format | Patent |
Language | English |
Published |
13.05.2021
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Subjects | |
Online Access | Get full text |
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Summary: | A flow rate control device 100 includes a control valve 6 provided in a flow path 1, a flow rate measurement unit 2, 3 for measuring fluid flow rate controlled by the control valve 6, and a controller 7. The controller 7 is configured so as to control the opening/closing operation of the control valve 6 to match the measurement integral flow rate based on the signal outputted from the flow rate measurement unit (Vn+Vd) to the target integral flow rate Vs. |
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Bibliography: | Application Number: US201916970278 |