GUIDING DEVICE AND ASSOCIATED SYSTEM

• Main Authors: LOGINOV, Maksim, DUARTE RODRIGUES NUNES, Rui Miguel, TEGENBOSCH, Henricus Gerardus, LABETSKI, Dzmitry, HUMMLER, Klaus Martin, MOJAB, Seyedmohammad, STEWART, John Tom, SHATALOV, Alexander, JOHNKADAKSHAM, Arun, LAFORGE, Andrew David, FEENSTRA, Kornelis Frits, BERENDSEN, Christianus Wilhelmus Johannes, ERSHOV, Alexander Igorevich, XIA, Chunguang, FOMENKOV, Igor Vladimirovich, NADIR, Kerim, KRAUSHAAR, Matthias, LANGLOIS, Marc Guy, MA, Yue
• Format: Patent
• Language: English
• Published: 13.05.2021
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CINEMATOGRAPHY; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; X-RAY TECHNIQUE

An extreme ultraviolet radiation (EUV) source, including: a vessel having an inner vessel wall and an intermediate focus (IF) region; an EUV collector disposed inside the vessel, the EUV collector including a reflective surface configured to reflect EUV radiation toward the intermediate focus region, the reflective surface configured to directionally face the IF region of the vessel; a showerhead disposed along at least a portion of the inner vessel wall, the showerhead including a plurality of nozzles configured to introduce gas into the vessel; and one or more exhausts configured to remove gas introduced into the vessel, the one or more exhausts being oriented along at least a portion of the inner vessel wall so that the gas is caused to flow away from the EUV collector.