MEMS MICROPHONE MODULE
A MEMS microphone includes a substrate, and a first conversion portion and a second conversion portion provided on the substrate, the first conversion portion and the second conversion portion convert sound into an electrical signal, the first conversion portion includes a first through hole, a firs...
Saved in:
Main Authors | , |
---|---|
Format | Patent |
Language | English |
Published |
29.04.2021
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | A MEMS microphone includes a substrate, and a first conversion portion and a second conversion portion provided on the substrate, the first conversion portion and the second conversion portion convert sound into an electrical signal, the first conversion portion includes a first through hole, a first membrane covering the first through hole, and a first back plate facing the first membrane via a first air gap, the second conversion portion includes a second through hole, a second membrane covering the second through hole, and a second back plate facing the second membrane via a second air gap, and a dimension of the second air gap is greater than a dimension of the first air gap in a thickness direction of the substrate. |
---|---|
Bibliography: | Application Number: US202117143401 |