FOREIGN SUBSTANCE INSPECTION APPARATUS AND FOREIGN SUBSTANCE INSPECTION METHOD

• Main Authors: Nakajima, Daisuke, Nakano, Hiroki, Yazawa, Yasuhiro, Maeda, Kohei, Iino, Masayoshi
• Format: Patent
• Language: English
• Published: 15.04.2021
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

Apparatus inspects the presence/absence of foreign substance on object having inspection region and non-inspection region arranged outside the inspection region. The apparatus includes sensor for illuminating the object and output, as image, result acquired by detecting light from region including t...