FOREIGN SUBSTANCE INSPECTION APPARATUS AND FOREIGN SUBSTANCE INSPECTION METHOD

• Main Authors: Nakajima, Daisuke, Nakano, Hiroki, Yazawa, Yasuhiro, Maeda, Kohei, Iino, Masayoshi
• Format: Patent
• Language: English
• Published: 15.04.2021
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

Apparatus inspects the presence/absence of foreign substance on object having inspection region and non-inspection region arranged outside the inspection region. The apparatus includes sensor for illuminating the object and output, as image, result acquired by detecting light from region including the inspection region, and processor for detecting foreign substance based on inspection region image acquired by excluding non-inspection region image, which is image of the non-inspection region, from the image output from the sensor. The non-inspection region image includes first part generated by light from predetermined part of the non-inspection region of the inspected object and second part whose pixel value is continuous from pixel value of the first part and the processor specifies the second part based on fact that the pixel value of the second part is continuous from that of the first part.