DROPLET GENERATION FOR A LASER PRODUCED PLASMA LIGHT SOURCE

The present disclosure is directed to a device having a nozzle for dispensing a liquid target material; one or more intermediary chamber(s), each intermediary chamber positioned to receive target material and formed with an exit aperture to output target material for downstream irradiation in a lase...

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Bibliographic Details
Main Authors Hale, Layton, Khodykin, Oleg, Garcia, Rudy F, Bykanov, Alexander, Ahr, Brian
Format Patent
LanguageEnglish
Published 08.04.2021
Subjects
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
X-RAY TECHNIQUE
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Summary:The present disclosure is directed to a device having a nozzle for dispensing a liquid target material; one or more intermediary chamber(s), each intermediary chamber positioned to receive target material and formed with an exit aperture to output target material for downstream irradiation in a laser produced plasma (LPP) chamber. In some disclosed embodiments, control systems are included for controlling one or more of gas temperature, gas pressure and gas composition in one, some or all of a device's intermediary chamber(s). In one embodiment, an intermediary chamber having an adjustable length is disclosed.
Bibliography:Application Number: US202017102256