PHOTORESIST BOTTLE REPLACEMENT SYSTEM

• Main Authors: Wu, Li-Jen, Chen, Yu Kai, WANG, Shi-Ming, CHIU, Huei-Chi, Yang, Sharon, YU, Oliver
• Format: Patent
• Language: English
• Published: 25.03.2021
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CHAMBERS PROVIDED WITH MANIPULATION DEVICES; CINEMATOGRAPHY; CONTROLLING; ELECTROGRAPHY; HAND TOOLS; HOLOGRAPHY; MANIPULATORS; MATERIALS THEREFOR; ORIGINALS THEREFOR; PERFORMING OPERATIONS; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; PORTABLE POWER-DRIVEN TOOLS; REGULATING; SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES; TRANSPORTING

The present disclosure describes a method for replacing a photoresist (PR) bottle using a vehicle. An exemplary vehicle includes a processor configured to receive a request signal to replace a first PR bottle. The processor is also configured to transmit an order based on the request signal. The vehicle also includes a plurality of wheels configured to move the vehicle from the first location to a second location, and from the second location to the first location. The vehicle further includes a robotic arm configured to load, at the first location, the first PR bottle into a first container; load a second PR bottle in a second container; remove a cap from the second PR bottle and a socket from the first PR bottle; couple the socket of the first PR bottle to the second PR bottle; and unload the second PR bottle from the second container.