PHOTORESIST BOTTLE REPLACEMENT SYSTEM

The present disclosure describes a method for replacing a photoresist (PR) bottle using a vehicle. An exemplary vehicle includes a processor configured to receive a request signal to replace a first PR bottle. The processor is also configured to transmit an order based on the request signal. The veh...

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Bibliographic Details
Main Authors Wu, Li-Jen, Chen, Yu Kai, WANG, Shi-Ming, CHIU, Huei-Chi, Yang, Sharon, YU, Oliver
Format Patent
LanguageEnglish
Published 25.03.2021
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
CHAMBERS PROVIDED WITH MANIPULATION DEVICES
CINEMATOGRAPHY
CONTROLLING
ELECTROGRAPHY
HAND TOOLS
HOLOGRAPHY
MANIPULATORS
MATERIALS THEREFOR
ORIGINALS THEREFOR
PERFORMING OPERATIONS
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
PORTABLE POWER-DRIVEN TOOLS
REGULATING
SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
TRANSPORTING
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Summary:The present disclosure describes a method for replacing a photoresist (PR) bottle using a vehicle. An exemplary vehicle includes a processor configured to receive a request signal to replace a first PR bottle. The processor is also configured to transmit an order based on the request signal. The vehicle also includes a plurality of wheels configured to move the vehicle from the first location to a second location, and from the second location to the first location. The vehicle further includes a robotic arm configured to load, at the first location, the first PR bottle into a first container; load a second PR bottle in a second container; remove a cap from the second PR bottle and a socket from the first PR bottle; couple the socket of the first PR bottle to the second PR bottle; and unload the second PR bottle from the second container.
Bibliography:Application Number: US202017113371