VACUUM ACTUATOR CONTAINMENT FOR MOLECULAR CONTAMINANT AND PARTICLE MITIGATION
An actuator for an optic mount in a vacuum environment includes a bellows around an actuator compartment. The bellows provides a seal around the actuator. A filter assembly is positioned between the actuator compartment and an interior of a vacuum chamber. The filter assembly includes a first partic...
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Main Authors | , , , , |
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Format | Patent |
Language | English |
Published |
18.02.2021
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Subjects | |
Online Access | Get full text |
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Summary: | An actuator for an optic mount in a vacuum environment includes a bellows around an actuator compartment. The bellows provides a seal around the actuator. A filter assembly is positioned between the actuator compartment and an interior of a vacuum chamber. The filter assembly includes a first particle filter, a second particle filter, and a purifier medium between the first particle filter and the second particle filter. Vacuum conditions in the actuator compartment can be achieved with a pump for the vacuum chamber, but particles and contaminants from the actuator or actuator compartment are captured by the filter assembly. |
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Bibliography: | Application Number: US202016986751 |