SEMICONDUCTOR DEVICE AND EQUIPMENT

Provided is a semiconductor device including a semiconductor layer in which a plurality of pixels each including a photoelectric converter is provided, and an interconnection structure arranged over the semiconductor layer. The plurality of pixels includes a first light-receiving pixel and a second...

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Bibliographic Details
Main Author Tezuka, Tomoyuki
Format Patent
LanguageEnglish
Published 28.01.2021
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:Provided is a semiconductor device including a semiconductor layer in which a plurality of pixels each including a photoelectric converter is provided, and an interconnection structure arranged over the semiconductor layer. The plurality of pixels includes a first light-receiving pixel and a second light-receiving pixel, the interconnection structure includes a first insulating film made of a first insulating material, a first insulating member arranged in association with the first light-receiving pixel and made of a second insulating material having a larger hydrogen content than the first insulating material, and a second insulating member arranged in association with the second light-receiving pixel and made of the second insulating material, and a volume of the first insulating member is larger than a volume of the second insulating member.
Bibliography:Application Number: US202016929424