FLOW CONTROL SYSTEM, METHOD, AND APPARATUS

A mass flow control apparatus having a monolithic base. The monolithic base has a gas inlet, a gas outlet, a first flow component mounting region, a second flow component mounting region, and a third flow component mounting region. The first flow component mounting region has a first inlet port and...

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Bibliographic Details
Main Authors Mudd, Daniel T, McIntyre, Zachariah Ezekiel, Batchelor, II, Norman L, Maeder, Michael, Mudd, Patti J, Kovacic, Matthew Eric, Davis, Christopher Bryant, Penley, Sean, Wright, Tyler James, Grill, Marshall B
Format Patent
LanguageEnglish
Published 07.01.2021
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Summary:A mass flow control apparatus having a monolithic base. The monolithic base has a gas inlet, a gas outlet, a first flow component mounting region, a second flow component mounting region, and a third flow component mounting region. The first flow component mounting region has a first inlet port and a first outlet port, the first inlet port being fluidly coupled to the gas inlet of the monolithic base. The third flow component mounting region has a first sensing port fluidly coupled to the gas outlet of the monolithic base.
Bibliography:Application Number: US202017027333