FLOW CONTROL SYSTEM, METHOD, AND APPARATUS
A mass flow control apparatus having a monolithic base. The monolithic base has a gas inlet, a gas outlet, a first flow component mounting region, a second flow component mounting region, and a third flow component mounting region. The first flow component mounting region has a first inlet port and...
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Main Authors | , , , , , , , , , |
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Format | Patent |
Language | English |
Published |
07.01.2021
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Subjects | |
Online Access | Get full text |
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Summary: | A mass flow control apparatus having a monolithic base. The monolithic base has a gas inlet, a gas outlet, a first flow component mounting region, a second flow component mounting region, and a third flow component mounting region. The first flow component mounting region has a first inlet port and a first outlet port, the first inlet port being fluidly coupled to the gas inlet of the monolithic base. The third flow component mounting region has a first sensing port fluidly coupled to the gas outlet of the monolithic base. |
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Bibliography: | Application Number: US202017027333 |