TESTING ASSEMBLY INCLUDING A MULTIPLE DEGREE OF FREEDOM STAGE

A multiple degree of freedom sample stage or testing assembly including a multiple degree of freedom sample stage. The multiple degree of freedom sample stage includes a plurality of stages including linear, and one or more of rotation or tilt stages configured to position a sample in a plurality of...

Full description

Saved in:
Bibliographic Details
Main Authors Feng, Yuxin, Cyrankowski, Edward, Asif, Syed Amanulla Syed, Rasugu, Derek, Major, Ryan
Format Patent
LanguageEnglish
Published 31.12.2020
Subjects
Online AccessGet full text

Cover

Loading…
More Information
Summary:A multiple degree of freedom sample stage or testing assembly including a multiple degree of freedom sample stage. The multiple degree of freedom sample stage includes a plurality of stages including linear, and one or more of rotation or tilt stages configured to position a sample in a plurality of orientations for access or observation by multiple instruments in a clustered volume that confines movement of the multiple degree of freedom sample stage. The multiple degree of freedom sample stage includes one or more clamping assemblies to statically hold the sample in place throughout observation and with the application of force to the sample, for instance by a mechanical testing instrument. Further, the multiple degree of freedom sample stage includes one or more cross roller bearing assemblies that substantially eliminate mechanical tolerance between elements of one or more stages in directions orthogonal to a moving axis of the respective stages.
Bibliography:Application Number: US202016845258