PIEZOELECTRIC SUBSTRATE AND SURFACE ACOUSTIC WAVE DEVICE

There is provided a piezoelectric substrate including a lithium-containing metal compound crystal such as a lithium tantalate (LT) crystal, wherein potassium is contained in the substrate and the distribution of potassium is approximately uniform as observed in the direction of the thickness of the...

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Bibliographic Details
Main Authors IWASHITA, Shuzo, INOUE, Shinji, KONDOU, Hisao, YAMAJI, Hiroyuki
Format Patent
LanguageEnglish
Published 17.12.2020
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Summary:There is provided a piezoelectric substrate including a lithium-containing metal compound crystal such as a lithium tantalate (LT) crystal, wherein potassium is contained in the substrate and the distribution of potassium is approximately uniform as observed in the direction of the thickness of the substrate. There is also provided a piezoelectric substrate, wherein a peak coming from Li-O lattice vibration and appearing around 380 cm−1 is shifted to a high wave number side compared with that in an untreated piezoelectric substrate having a conductivity of 1×10−15 S/cm or less in Raman spectra measured from the cross section direction.
Bibliography:Application Number: US201816311384