LOAD SENSOR AND LOAD SENSOR INTEGRATED TYPE MULTIAXIAL ACTUATOR

• Main Authors: LI, Kui, EGUCHI, Kotaro
• Format: Patent
• Language: English
• Published: 17.12.2020
• Subjects: MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; TESTING

Provided is a load sensor that can precisely detect a load of pressing force to an object. A load sensor to be used for a multiaxial actuator (10) that has a drive rod (12) that linearly moves in an axial direction in a state where the drive rod (12) is contained in a housing (11), and a suction rod (22) that is arranged in parallel with the drive rod (12), linearly moves at the same time as the drive rod (12) in the axial direction, and has a tip end portion (22a) to be pressed, when a chip is to be suctioned, against the chip, includes a coupling member (30) that couples the drive rod (12) and the suction rod (22), the coupling member (30) has a first coupling part (31) that couples the drive rod (12), and a second coupling part (32) that couples the suction rod (22), and a neck part (33) that is provided between the first coupling part (31) and the second coupling part (32) and formed to be thinner than the first coupling part (31) and the second coupling part (32), and the neck part (33) includes strain gauges (41) to (44) attached to a front surface of the neck part (33).