SEMICONDUCTOR DEVICE

A semiconductor device has a coil and wirings under the coil. In addition, a distance between the upper face of the wirings and the bottom face of the coil is 7 μm or larger, and the wirings have a plurality of linear wiring parts each wiring width of which is 1 μm or smaller. In addition, the linea...

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Bibliographic Details
Main Authors IIDA, Tetsuya, NAKASHIBA, Yasutaka, ONO, Akio, KUWAJIMA, Teruhiro, MATSUMOTO, Akira
Format Patent
LanguageEnglish
Published 19.11.2020
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Summary:A semiconductor device has a coil and wirings under the coil. In addition, a distance between the upper face of the wirings and the bottom face of the coil is 7 μm or larger, and the wirings have a plurality of linear wiring parts each wiring width of which is 1 μm or smaller. In addition, the linear wiring parts do not configure a loop wiring, and the coil and the linear wiring parts are overlapped with each other in planar view.
Bibliography:Application Number: US202016984710