METHOD OF GROWING SEMICONDUCTOR LAYERS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND METHOD OF GROWING BALK CRYSTAL

• Main Authors: TAHARA, Daisuke, NAGAOKA, Tatsuji, NISHINAKA, Hiroyuki, YOSHIMOTO, Masahiro
• Format: Patent
• Language: English
• Published: 19.11.2020
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A method of growing semiconductor layers may include: growing a first semiconductor layer on a surface of a substrate at which a crystal layer is exposed, wherein the first semiconductor layer is different from the crystal layer in at least one of a material and a crystal structure; cutting the firs...