THREE-AXIS MICROMECHANICAL ROTATION RATE SENSOR SYSTEM INCLUDING LINEARLY AND ROTATORILY DRIVABLE SENSOR UNITS

A micromechanical rotation rate sensor system and a corresponding manufacturing method are described. The micromechanical rotation rate sensor system includes a first rotation rate sensor unit drivable rotatorily about a first axis in an oscillating manner for detecting a first outside rotation rate...

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Bibliographic Details
Main Authors Liewald, Jan-Timo, Kuhlmann, Burkhard, Neul, Reinhard, Kuhlmann, Nils Felix, Lassl, Andreas, Kuehnel, Matthias, Bode, Niels, Pruetz, Odd-Axel, Degenfeld-Schonburg, Peter
Format Patent
LanguageEnglish
Published 12.11.2020
Subjects
GYROSCOPIC INSTRUMENTS
MEASURING
MEASURING DISTANCES, LEVELS OR BEARINGS
NAVIGATION
PHOTOGRAMMETRY OR VIDEOGRAMMETRY
PHYSICS
SURVEYING
TESTING
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Summary:A micromechanical rotation rate sensor system and a corresponding manufacturing method are described. The micromechanical rotation rate sensor system includes a first rotation rate sensor unit drivable rotatorily about a first axis in an oscillating manner for detecting a first outside rotation rate about a second axis and a second outside rotation rate about a third axis, the first, second and third axes being situated perpendicularly to one another, and a second rotation rate sensor unit linearly drivable by a drive unit along the second axis in an oscillating manner for detecting a third outside rotation rate about the first axis. The second rotation rate sensor unit is connected to the first rotation rate sensor unit via a first coupling unit for driving the first rotation rate sensor unit by the drive unit.
Bibliography:Application Number: US201816640882