APPARATUS AND METHOD FOR DETERMINING A CONDITION ASSOCIATED WITH A PELLICLE

An apparatus for determining a condition associated with a pellicle for use in a lithographic apparatus, the apparatus including a sensor, wherein the sensor is configured to measure a property associated with the pellicle, the property being indicative of the pellicle condition.

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Bibliographic Details
Main Authors ADAMS, Joshua, JUDGE, Andrew, XIONG, Xugang, KOTTAPALLI, Veera Venkata Narasimha Narendra Phani, MODDERMAN, Theodorus Marinus, LYONS, Joseph Harry, BENDIKSEN, Aage, VAN DE KERKHOF, Marcus Adrianus, BROUNS, Derk Servatius Gertruda, JACOBS, Richard, RANJAN, Manish
Format Patent
LanguageEnglish
Published 29.10.2020
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
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Summary:An apparatus for determining a condition associated with a pellicle for use in a lithographic apparatus, the apparatus including a sensor, wherein the sensor is configured to measure a property associated with the pellicle, the property being indicative of the pellicle condition.
Bibliography:Application Number: US201816765339