CHARGED PARTICLE BEAM APPARATUS, AND SYSTEMS AND METHODS FOR OPERATING THE APPARATUS

A charged particle beam apparatus includes a beamlet forming unit configured to form and scan an array of beamlets on a sample. A first portion of the array of beamlets is focused onto a focus plane, and a second portion of the array of beamlets has at least one beamlet with a defocusing level with...

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Bibliographic Details
Main Authors MAASSEN, Martinus Gerardus, Maria, Johannes, HEMPENIUS, Peter Paul, REN, Weiming, CHEN, Zhongwei
Format Patent
LanguageEnglish
Published 10.09.2020
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Summary:A charged particle beam apparatus includes a beamlet forming unit configured to form and scan an array of beamlets on a sample. A first portion of the array of beamlets is focused onto a focus plane, and a second portion of the array of beamlets has at least one beamlet with a defocusing level with respect to the focus plane. The charged particle beam apparatus also includes a detector configured to detect an image of the sample formed by the array of beamlets, and a processor configured to estimate a level of separation between the focus plane and the sample based on the detected image and then reduce the level of separation based on the estimated level.
Bibliography:Application Number: US202016824499