MEMS DEVICE INCLUDING SPURIOUS MODE SUPPRESSION AND CORRESPONDING OPERATING METHOD

A MEMS device and a corresponding operating method. The MEMS device is equipped with an oscillatory micromechanical system, which is excitable in a plurality of useful modes, the oscillatory micromechanical system including at least one system component, which is excitable in at least one parasitic...

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Bibliographic Details
Main Authors Schatz, Frank, Neul, Reinhard, Kuhlmann, Nils Felix, Lassl, Andreas, Kuehnel, Matthias, Bode, Niels, Degenfeld-Schonburg, Peter
Format Patent
LanguageEnglish
Published 10.09.2020
Subjects
GYROSCOPIC INSTRUMENTS
MEASURING
MEASURING DISTANCES, LEVELS OR BEARINGS
NAVIGATION
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHOTOGRAMMETRY OR VIDEOGRAMMETRY
PHYSICS
SURVEYING
TESTING
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Summary:A MEMS device and a corresponding operating method. The MEMS device is equipped with an oscillatory micromechanical system, which is excitable in a plurality of useful modes, the oscillatory micromechanical system including at least one system component, which is excitable in at least one parasitic spurious mode by a superposition of the useful modes. An adjusting device is provided, which is configured in such a way that it counteracts the parasitic spurious mode by application of an electromagnetic interaction to the system component.
Bibliography:Application Number: US201816645268