SUPPORT SYSTEM FOR SPECIFIED INSPECTION, SUPPORT METHOD FOR SPECIFIED INSPECTION, AND NON-TRANSITORY COMPUTER READABLE MEDIUM

• Main Authors: OOMINAMI, Yuusuke, TADA, Nobuyoshi, TANAKA, Shigeya, GOTO, Maya, NOGUCHI, Minori
• Format: Patent
• Language: English
• Published: 03.09.2020
• Subjects: CALCULATING; COMPUTER SYSTEMS BASED ON SPECIFIC COMPUTATIONAL MODELS; COMPUTING; COUNTING; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

The purpose of the present invention is to increase accuracy of a specific test using an electronic microscope and improve work efficiency. Provided is a system that identifies test recipe information corresponding to an object to be tested on the basis of attribute information about a testing sampl...