SUPPORT SYSTEM FOR SPECIFIED INSPECTION, SUPPORT METHOD FOR SPECIFIED INSPECTION, AND NON-TRANSITORY COMPUTER READABLE MEDIUM

The purpose of the present invention is to increase accuracy of a specific test using an electronic microscope and improve work efficiency. Provided is a system that identifies test recipe information corresponding to an object to be tested on the basis of attribute information about a testing sampl...

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Bibliographic Details
Main Authors OOMINAMI, Yuusuke, TADA, Nobuyoshi, TANAKA, Shigeya, GOTO, Maya, NOGUCHI, Minori
Format Patent
LanguageEnglish
Published 03.09.2020
Subjects
CALCULATING
COMPUTER SYSTEMS BASED ON SPECIFIC COMPUTATIONAL MODELS
COMPUTING
COUNTING
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Summary:The purpose of the present invention is to increase accuracy of a specific test using an electronic microscope and improve work efficiency. Provided is a system that identifies test recipe information corresponding to an object to be tested on the basis of attribute information about a testing sample, and analyzes and evaluates the object to be tested contained in the testing sample by checking image data and element analysis data that are acquired by a measuring device in accordance with a control program for the test recipe information, against reference image data and reference element analysis data that are used as evaluation references for the object to be tested.
Bibliography:Application Number: US201816651035