Metrology Apparatus with Radiation Source Having Multiple Broadband Outputs
Disclosed is a metrology apparatus for use in a lithographic manufacturing process. The metrology apparatus comprises a radiation source comprising a drive laser having an output split into a plurality of optical paths, each comprising a respective broadband light generator. The metrology apparatus...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
20.08.2020
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Subjects | |
Online Access | Get full text |
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Summary: | Disclosed is a metrology apparatus for use in a lithographic manufacturing process. The metrology apparatus comprises a radiation source comprising a drive laser having an output split into a plurality of optical paths, each comprising a respective broadband light generator. The metrology apparatus further comprises illumination optics for illuminating a structure, at least one detection system for detecting scattered radiation, having been scattered by the structure and a processor for determining a parameter of interest of the structure from the scattered radiation. |
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Bibliography: | Application Number: US202016789816 |