OPTICAL MICROSCOPE AND SPECTROSCOPIC MEASUREMENT METHOD

An optical microscope according to one aspect of the present disclosure includes: a light source; a first scanner to scan a spot position of a light beam on a sample; an objective lens to focus the light beam deflected by the first scanner and cause the light beam to be made incident on the sample;...

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Bibliographic Details
Main Authors MATSUZAKA, Shunichiro, KOBAYASHI, Minoru, OTA, Taisuke, KAWANO, Shogo, YAMAUCHI, Shota, SHIOZAKI, Yusuke
Format Patent
LanguageEnglish
Published 06.08.2020
Subjects
COLORIMETRY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT
MEASURING
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
RADIATION PYROMETRY
TESTING
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Summary:An optical microscope according to one aspect of the present disclosure includes: a light source; a first scanner to scan a spot position of a light beam on a sample; an objective lens to focus the light beam deflected by the first scanner and cause the light beam to be made incident on the sample; a spectroscope including a slit on an incident side which an outgoing light emitted from an area on the sample onto which the light beam has been illuminated enters; a detector configured to detect an outgoing light from the spectroscope; and a first relay optical system including a first off-axis parabolic mirror that is arranged in an optical path from the first scanner to the objective lens and reflect the light beam deflected by the first scanner and a second off-axis parabolic mirror that reflects the light beam reflected in the first off-axis parabolic mirror.
Bibliography:Application Number: US201816640012