PHOTODETECTOR AND METHOD FOR FABRICATING THE SAME
A photodetector includes a substrate, at least one nanowire and a cladding layer. The at least one nanowire is disposed on the substrate and has a semiconductor core. The cladding layer is disposed on sidewalls of the semiconductor core and includes an epitaxial semiconductor film in contact with th...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
23.07.2020
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Subjects | |
Online Access | Get full text |
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Summary: | A photodetector includes a substrate, at least one nanowire and a cladding layer. The at least one nanowire is disposed on the substrate and has a semiconductor core. The cladding layer is disposed on sidewalls of the semiconductor core and includes an epitaxial semiconductor film in contact with the sidewalls of the semiconductor core, a metal film disposed on the outside of the epitaxial semiconductor film and a high-k material layer disposed on the outside of metal film. |
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Bibliography: | Application Number: US201916283895 |