ELECTRONIC CIRCUIT FOR FILTERING SIGNAL RECEIVED FROM PLASMA CHAMBER

An electronic circuit includes a first filter and a second filter. The first filter passes a first frequency component of a first harmonic frequency generated by a first voltage source to form a potential difference in a chamber and a second frequency component of a second harmonic frequency higher...

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Bibliographic Details
Main Authors KIM, Myoungwoon, JEONG, Hee Jong, IM, Jiwoon, KIM, Hyungjoon, KWON, Younghoon, JUNG, Jaewon, KIM, Il-Woo, LEE, Je-Dong
Format Patent
LanguageEnglish
Published 25.06.2020
Subjects
BASIC ELECTRIC ELEMENTS
BASIC ELECTRONIC CIRCUITRY
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
RESONATORS
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Summary:An electronic circuit includes a first filter and a second filter. The first filter passes a first frequency component of a first harmonic frequency generated by a first voltage source to form a potential difference in a chamber and a second frequency component of a second harmonic frequency higher than the first harmonic frequency. The second filter removes the first frequency component and the second frequency component received from the first filter. The second harmonic frequency is included in a first frequency band determined based on a capacitance of the second filter.
Bibliography:Application Number: US201916593376